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Semiconducteur

Header Semiconducteur

Description

Applications in the Semiconductor Industry range from seals and components for process equipment used in the fabrication of integrated circuits or semiconductors.

Solutions

SEMI (Semiconductor Equipment and Materials International) is a pseudo regulatory organisation offering some standards and testing procedures.

Semiconductor Industry Applications
SegmentsEnvironmentElastomersSealing Considerations
Crystal Growth (Pulling)25 to 200 C .001 - .01 torrFKMHigh thermal stability, chemical resistance, good vacuum performance
Thermal (LPCVD) Nitride, Oxide, ...23 to 300 C .5 - 1.0 torrFKM, VMQ, FFKMHigh thermal stability, chemical resistance, good vacuum performance
Track & Lithography25 to 100 C ambientFKM, EPDM FFKM (AU)Chemical resistance - solvents
Dry Etch25 to 200 C .1 - 1.0 torrFKM, FFKMChemical resistance, plasma resistance, thermal stability, non-black preferred
Wet Etch25 to 200 C ambientFKM, TFE, FFKMChemical resistance, no elemental contamination
Resist Stripping25 to 250 C .001 - .01 torrFVMQ, VMQ, FKM, FFKMChemical resistance - especially oxygen- rich and ozone environment
Cleaning25 to 200 C ambientFKM, FFKMAcid and solvent resistance, some high pH chemical resistance
Chemical Vapor Deposition (CVD)25 to 250 C .001 - .01 torrFKM, FFKMHigh vacuum performance, chemical resistance, thermal stability
Ion Implant25 to 200 C .0000001 torrNBR, FKMUltrahigh vacuum performance, low outgassing and permeation
Physical Vapor Deposition (PVD)25 to 200 C .000001 - .02 torrFKMUltrahigh vacuum performance, low outgassing and permeation
Chemical Mechanical25 to 80 C ambientEPDM, FFKMAbrasion resistance, high pH chemical resistance
Mélange (?) Matériau Dureté IRHD ± 5 Conformités Application Couleur Temp. min. Temp. max sort_index
4079 Kalrez® 75 Logo ADIADILogo REACHREACHLogo RoHSRoHS Semiconductor | Chemical Processing Black -10 316 zzzzz
8002 Kalrez® 70 Logo ADIADILogo REACHREACHLogo RoHSRoHS Semiconductor Clear -10 250 zzzzz
8085 Kalrez® 80 Logo ADIADILogo REACHREACHLogo RoHSRoHS Semiconductor Beige -10 240 zzzzz
8475 Kalrez® 60 Logo ADIADILogo REACHREACHLogo RoHSRoHS Semiconductor White -10 300 zzzzz
8575 Kalrez® 60 Logo ADIADILogo REACHREACHLogo RoHSRoHS Semiconductor White -10 300 zzzzz
9100 Kalrez® 75 Logo ADIADILogo REACHREACHLogo RoHSRoHS Semiconductor Transluc. -10 300 zzzzz
2037UP Kalrez® 80 Logo ADIADILogo REACHREACHLogo RoHSRoHS Semiconductor White -10 220 zzzzz
6375UP Kalrez® 75 Logo ADIADILogo REACHREACHLogo RoHSRoHS Semiconductor Black -10 275 zzzzz
7075UP Kalrez® 75 Logo ADIADILogo REACHREACHLogo RoHSRoHS Semiconductor Black -10 327 zzzzz
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This is a printed version of O-Ring.info of ERIKS nv.
© ERIKS nv, 2016.