Kalrez® 4079 is a black, low compression set compound for use in many dry and wet semiconductor process environments. It has excellent chemical resistance, good mechanical properties and outstanding thermal stability. Kalrez® 4079 exhibits low weight loss in reactive plasmas and has good response to temperature cycling effects. It is not recommended for use in amines. A maximum continuous service temperature of 316°C is suggested. Short excursions to higher temperatures are also possible. Ultrapure post-cleaning and packaging is optional.
Datasheet Kalrez ® 4079
Kalrez® 4079 Offers Excellent Resistance to Chemical Attack
For many applications, low volume swell of elastomers is critical for proper equipment operation. Excessive swell may cause permanent seal failure due to equipment hang-up, extrusion, etc. While other physical property testing may be needed to adequately define product performance in a particular application, volume swell is an excellent indicator of resistance to chemical attack. A summary of the internal and external compatibility tests performed to determine the volume swell of
Kalrez® 4079UP in various semiconductor wet process environments is provided.
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